เปรียบเทียบวิธี

	การวิเคราะห์สเปกตรัมรังสีเอกซ์แบบกระจายพลังงาน	Atomic Force Microscopy
สาขาวิชา	วัสดุศาสตร์	วัสดุศาสตร์
ตระกูล	Process / pipeline	Process / pipeline
ปีกำเนิด	1913	1986
ผู้ริเริ่ม	Henry Moseley	Gerd Binnig
ประเภท	Analytical technique	Imaging technique
แหล่งต้นตำรับ	Goldstein, J. I., Newbury, D. E., Michael, J. R., & Ritchie, R. O. (2017). Scanning Electron Microscopy and X-ray Microanalysis (3rd ed.). Springer.	Binnig, G., Quate, C. F., & Gerber, C. (1986). Atomic force microscope. Physical Review Letters, 56(9), 930-933.
ชื่อเรียกอื่น	EDS, EDX, EDAX, elemental microanalysis	AFM, scanning probe microscopy, nanoindentation microscopy
ที่เกี่ยวข้อง	3	3
สรุป	Energy-Dispersive X-ray Spectroscopy (EDS) is an analytical technique that identifies and quantifies chemical elements in microvolumes of samples by analyzing characteristic X-rays emitted during electron bombardment. Rooted in Moseley's discovery of characteristic X-ray lines in 1913 and developed as a practical microanalytical tool by the 1970s, EDS is integrated into scanning electron microscopes (SEM) and transmission electron microscopes (TEM) for spatially-resolved elemental analysis. It is indispensable in materials characterization for phase identification, compositional mapping, and alloy development.	Atomic Force Microscopy (AFM) is a scanning probe technique that measures nanoscale surface topography and mechanical properties by monitoring interactions between a sharp cantilever tip and a sample surface. Invented by Gerd Binnig in 1986 as an extension of scanning tunneling microscopy, AFM requires neither electrical conductivity nor vacuum operation, making it applicable to virtually any material. It provides three-dimensional topographic maps with sub-nanometer vertical resolution and lateral resolution approaching nanometers, along with simultaneous measurements of mechanical, electrical, and chemical properties.