เปรียบเทียบวิธี

	Atomic Force Microscopy	การวิเคราะห์สเปกตรัมรังสีเอกซ์แบบกระจายพลังงาน
สาขาวิชา	วัสดุศาสตร์	วัสดุศาสตร์
ตระกูล	Process / pipeline	Process / pipeline
ปีกำเนิด	1986	1913
ผู้ริเริ่ม	Gerd Binnig	Henry Moseley
ประเภท	Imaging technique	Analytical technique
แหล่งต้นตำรับ	Binnig, G., Quate, C. F., & Gerber, C. (1986). Atomic force microscope. Physical Review Letters, 56(9), 930-933.	Goldstein, J. I., Newbury, D. E., Michael, J. R., & Ritchie, R. O. (2017). Scanning Electron Microscopy and X-ray Microanalysis (3rd ed.). Springer.
ชื่อเรียกอื่น	AFM, scanning probe microscopy, nanoindentation microscopy	EDS, EDX, EDAX, elemental microanalysis
ที่เกี่ยวข้อง	3	3
สรุป	Atomic Force Microscopy (AFM) is a scanning probe technique that measures nanoscale surface topography and mechanical properties by monitoring interactions between a sharp cantilever tip and a sample surface. Invented by Gerd Binnig in 1986 as an extension of scanning tunneling microscopy, AFM requires neither electrical conductivity nor vacuum operation, making it applicable to virtually any material. It provides three-dimensional topographic maps with sub-nanometer vertical resolution and lateral resolution approaching nanometers, along with simultaneous measurements of mechanical, electrical, and chemical properties.	Energy-Dispersive X-ray Spectroscopy (EDS) is an analytical technique that identifies and quantifies chemical elements in microvolumes of samples by analyzing characteristic X-rays emitted during electron bombardment. Rooted in Moseley's discovery of characteristic X-ray lines in 1913 and developed as a practical microanalytical tool by the 1970s, EDS is integrated into scanning electron microscopes (SEM) and transmission electron microscopes (TEM) for spatially-resolved elemental analysis. It is indispensable in materials characterization for phase identification, compositional mapping, and alloy development.