방법 비교

	에너지 분산형 X선 분광법	선택 영역 전자 회절
분야	재료과학	재료과학
계열	Process / pipeline	Process / pipeline
기원 연도	1913	1913
창시자	Henry Moseley	Georges Friedel
유형	Analytical technique	Diffraction technique
원전	Goldstein, J. I., Newbury, D. E., Michael, J. R., & Ritchie, R. O. (2017). Scanning Electron Microscopy and X-ray Microanalysis (3rd ed.). Springer.	Williams, D. B., & Carter, C. B. (2009). Transmission Electron Microscopy: A Textbook for Materials Science (2nd ed.). Springer.
별칭	EDS, EDX, EDAX, elemental microanalysis	SAED, electron diffraction pattern, TEM diffraction
관련	3	3
요약	Energy-Dispersive X-ray Spectroscopy (EDS) is an analytical technique that identifies and quantifies chemical elements in microvolumes of samples by analyzing characteristic X-rays emitted during electron bombardment. Rooted in Moseley's discovery of characteristic X-ray lines in 1913 and developed as a practical microanalytical tool by the 1970s, EDS is integrated into scanning electron microscopes (SEM) and transmission electron microscopes (TEM) for spatially-resolved elemental analysis. It is indispensable in materials characterization for phase identification, compositional mapping, and alloy development.	Selected Area Electron Diffraction (SAED) is a crystallographic technique in transmission electron microscopy that obtains electron diffraction patterns from micron-sized or sub-micron crystalline regions. Developed from fundamental principles of electron wave behavior and integrated into TEM instruments by the mid-20th century, SAED enables direct observation of reciprocal space, crystal symmetry, and defect structures with spatial resolution unattainable by X-ray diffraction. It is essential for studying local crystal structure, phase identification, and characterizing nanoscale materials.