手法を比較

	X線光電子分光法	選択領域電子回折
分野	材料科学	材料科学
系統	Process / pipeline	Process / pipeline
提唱年	1967	1913
提唱者	Kai Siegbahn	Georges Friedel
種類	Analytical technique	Diffraction technique
原典	Siegbahn, K., Nordling, C., Fahlman, A., et al. (1967). ESCA: Atomic, Molecular and Solid State Structure Studied by Means of Electron Spectroscopy. Almqvist and Wiksells.	Williams, D. B., & Carter, C. B. (2009). Transmission Electron Microscopy: A Textbook for Materials Science (2nd ed.). Springer.
別名	XPS, ESCA, electron spectroscopy for chemical analysis	SAED, electron diffraction pattern, TEM diffraction
関連	3	3
概要	X-ray Photoelectron Spectroscopy (XPS), also known as Electron Spectroscopy for Chemical Analysis (ESCA), is a surface-sensitive analytical technique that measures the kinetic energies of photoelectrons ejected from a material by high-energy X-rays. Developed by Kai Siegbahn in 1967, XPS determines elemental composition, chemical oxidation states, and chemical bonding within ~10 nanometers of a surface. It is indispensable in materials science for surface characterization, corrosion studies, oxide analysis, and interface chemistry.	Selected Area Electron Diffraction (SAED) is a crystallographic technique in transmission electron microscopy that obtains electron diffraction patterns from micron-sized or sub-micron crystalline regions. Developed from fundamental principles of electron wave behavior and integrated into TEM instruments by the mid-20th century, SAED enables direct observation of reciprocal space, crystal symmetry, and defect structures with spatial resolution unattainable by X-ray diffraction. It is essential for studying local crystal structure, phase identification, and characterizing nanoscale materials.