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	原子間力顕微鏡	ナノインデンテーション
分野	材料科学	材料科学
系統	Process / pipeline	Process / pipeline
提唱年	1986	1992
提唱者	Gerd Binnig	Warren Oliver
種類	Imaging technique	Measurement method
原典	Binnig, G., Quate, C. F., & Gerber, C. (1986). Atomic force microscope. Physical Review Letters, 56(9), 930-933.	Oliver, W. C., & Pharr, G. M. (1992). An improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experiments. Journal of Materials Research, 7(6), 1564-1583.
別名	AFM, scanning probe microscopy, nanoindentation microscopy	nanoindentation, instrumented indentation, depth-sensing indentation
関連	3	3
概要	Atomic Force Microscopy (AFM) is a scanning probe technique that measures nanoscale surface topography and mechanical properties by monitoring interactions between a sharp cantilever tip and a sample surface. Invented by Gerd Binnig in 1986 as an extension of scanning tunneling microscopy, AFM requires neither electrical conductivity nor vacuum operation, making it applicable to virtually any material. It provides three-dimensional topographic maps with sub-nanometer vertical resolution and lateral resolution approaching nanometers, along with simultaneous measurements of mechanical, electrical, and chemical properties.	Nanoindentation, or instrumented indentation, is a technique for measuring the hardness and elastic modulus of materials by pressing a hard probe into a sample surface and continuously recording load and penetration depth. Developed by Oliver and Pharr in 1992, nanoindentation enables measurement of mechanical properties of thin films, small volumes, and nanoscale structures with spatial resolution approaching micrometers. It is the standard tool in materials science for characterizing coatings, interfaces, and mechanical properties at the submicron scale.