X-ray Photoelectron Spectroscopy
X-ray Photoelectron Spectroscopy (XPS), also known as Electron Spectroscopy for Chemical Analysis (ESCA), is a surface-sensitive analytical technique that measures the kinetic energies of photoelectrons ejected from a material by high-energy X-rays. Developed by Kai Siegbahn in 1967, XPS determines elemental composition, chemical oxidation states, and chemical bonding within ~10 nanometers of a surface. It is indispensable in materials science for surface characterization, corrosion studies, oxide analysis, and interface chemistry.
Source record
Citations copied verbatim from the method’s source record. No claim-level verification is inferred from them.
- Siegbahn, K., Nordling, C., Fahlman, A., et al. (1967). ESCA: Atomic, Molecular and Solid State Structure Studied by Means of Electron Spectroscopy. Almqvist and Wiksells. · URL
- Briggs, D., & Seah, M. P. (2003). Practical Surface Analysis by Auger and X-ray Photoelectron Spectroscopy (2nd ed.). John Wiley & Sons. · URL
- Moulder, J. F., Stickle, W. F., Sobol, P. E., & Bomben, K. D. (1992). Handbook of X-ray Photoelectron Spectroscopy. Physical Electronics. · URL
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Related methods
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