Process / pipelineSurface spectroscopy

X-ray Photoelectron Spectroscopy

X-ray Photoelectron Spectroscopy (XPS), also known as Electron Spectroscopy for Chemical Analysis (ESCA), is a surface-sensitive analytical technique that measures the kinetic energies of photoelectrons ejected from a material by high-energy X-rays. Developed by Kai Siegbahn in 1967, XPS determines elemental composition, chemical oxidation states, and chemical bonding within ~10 nanometers of a surface. It is indispensable in materials science for surface characterization, corrosion studies, oxide analysis, and interface chemistry.

Open in MethodMindSoonVideoSoon

Read the full method

Members only

Sign in with a free account to read this section.

Sign in

Sources

  1. Siegbahn, K., Nordling, C., Fahlman, A., et al. (1967). ESCA: Atomic, Molecular and Solid State Structure Studied by Means of Electron Spectroscopy. Almqvist and Wiksells. link
  2. Briggs, D., & Seah, M. P. (2003). Practical Surface Analysis by Auger and X-ray Photoelectron Spectroscopy (2nd ed.). John Wiley & Sons. link
  3. Moulder, J. F., Stickle, W. F., Sobol, P. E., & Bomben, K. D. (1992). Handbook of X-ray Photoelectron Spectroscopy. Physical Electronics. link

Related methods

Referenced by

ScholarGateX-ray Photoelectron Spectroscopy (X-ray Photoelectron Spectroscopy (XPS)). Retrieved 2026-06-04 from https://scholargate.app/en/materials-science/x-ray-photoelectron-spectroscopy