Process / pipelineElectron microscopy analysis

Energy-Dispersive X-ray Spectroscopy

Energy-Dispersive X-ray Spectroscopy (EDS) is an analytical technique that identifies and quantifies chemical elements in microvolumes of samples by analyzing characteristic X-rays emitted during electron bombardment. Rooted in Moseley's discovery of characteristic X-ray lines in 1913 and developed as a practical microanalytical tool by the 1970s, EDS is integrated into scanning electron microscopes (SEM) and transmission electron microscopes (TEM) for spatially-resolved elemental analysis. It is indispensable in materials characterization for phase identification, compositional mapping, and alloy development.

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Sources

  1. Goldstein, J. I., Newbury, D. E., Michael, J. R., & Ritchie, R. O. (2017). Scanning Electron Microscopy and X-ray Microanalysis (3rd ed.). Springer. DOI: 10.1007/978-1-4939-6676-9
  2. Reed, S. J. B. (1993). Electron Microprobe Analysis (2nd ed.). Cambridge University Press. link
  3. Williams, D. B., & Carter, C. B. (2009). Transmission Electron Microscopy: A Textbook for Materials Science (2nd ed.). Springer. DOI: 10.1007/978-0-387-76495-0

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ScholarGateEnergy-Dispersive X-ray Spectroscopy (Energy-Dispersive X-ray Spectroscopy (EDS)). Retrieved 2026-06-04 from https://scholargate.app/en/materials-science/energy-dispersive-x-ray-spectroscopy