So sánh phương pháp

	Quang phổ photoelectron tia X	Phân tích nhiễu xạ điện tử vùng chọn lọc
Lĩnh vực	Khoa học vật liệu	Khoa học vật liệu
Họ	Process / pipeline	Process / pipeline
Năm ra đời	1967	1913
Người khởi xướng	Kai Siegbahn	Georges Friedel
Loại	Analytical technique	Diffraction technique
Công trình gốc	Siegbahn, K., Nordling, C., Fahlman, A., et al. (1967). ESCA: Atomic, Molecular and Solid State Structure Studied by Means of Electron Spectroscopy. Almqvist and Wiksells.	Williams, D. B., & Carter, C. B. (2009). Transmission Electron Microscopy: A Textbook for Materials Science (2nd ed.). Springer.
Tên gọi khác	XPS, ESCA, electron spectroscopy for chemical analysis	SAED, electron diffraction pattern, TEM diffraction
Liên quan	3	3
Tóm tắt	X-ray Photoelectron Spectroscopy (XPS), also known as Electron Spectroscopy for Chemical Analysis (ESCA), is a surface-sensitive analytical technique that measures the kinetic energies of photoelectrons ejected from a material by high-energy X-rays. Developed by Kai Siegbahn in 1967, XPS determines elemental composition, chemical oxidation states, and chemical bonding within ~10 nanometers of a surface. It is indispensable in materials science for surface characterization, corrosion studies, oxide analysis, and interface chemistry.	Selected Area Electron Diffraction (SAED) is a crystallographic technique in transmission electron microscopy that obtains electron diffraction patterns from micron-sized or sub-micron crystalline regions. Developed from fundamental principles of electron wave behavior and integrated into TEM instruments by the mid-20th century, SAED enables direct observation of reciprocal space, crystal symmetry, and defect structures with spatial resolution unattainable by X-ray diffraction. It is essential for studying local crystal structure, phase identification, and characterizing nanoscale materials.