เปรียบเทียบวิธี

	การวิเคราะห์สเปกตรัมรังสีเอกซ์แบบกระจายพลังงาน	X-ray Photoelectron Spectroscopy
สาขาวิชา	วัสดุศาสตร์	วัสดุศาสตร์
ตระกูล	Process / pipeline	Process / pipeline
ปีกำเนิด	1913	1967
ผู้ริเริ่ม	Henry Moseley	Kai Siegbahn
ประเภท	Analytical technique	Analytical technique
แหล่งต้นตำรับ	Goldstein, J. I., Newbury, D. E., Michael, J. R., & Ritchie, R. O. (2017). Scanning Electron Microscopy and X-ray Microanalysis (3rd ed.). Springer.	Siegbahn, K., Nordling, C., Fahlman, A., et al. (1967). ESCA: Atomic, Molecular and Solid State Structure Studied by Means of Electron Spectroscopy. Almqvist and Wiksells.
ชื่อเรียกอื่น	EDS, EDX, EDAX, elemental microanalysis	XPS, ESCA, electron spectroscopy for chemical analysis
ที่เกี่ยวข้อง	3	3
สรุป	Energy-Dispersive X-ray Spectroscopy (EDS) is an analytical technique that identifies and quantifies chemical elements in microvolumes of samples by analyzing characteristic X-rays emitted during electron bombardment. Rooted in Moseley's discovery of characteristic X-ray lines in 1913 and developed as a practical microanalytical tool by the 1970s, EDS is integrated into scanning electron microscopes (SEM) and transmission electron microscopes (TEM) for spatially-resolved elemental analysis. It is indispensable in materials characterization for phase identification, compositional mapping, and alloy development.	X-ray Photoelectron Spectroscopy (XPS), also known as Electron Spectroscopy for Chemical Analysis (ESCA), is a surface-sensitive analytical technique that measures the kinetic energies of photoelectrons ejected from a material by high-energy X-rays. Developed by Kai Siegbahn in 1967, XPS determines elemental composition, chemical oxidation states, and chemical bonding within ~10 nanometers of a surface. It is indispensable in materials science for surface characterization, corrosion studies, oxide analysis, and interface chemistry.