So sánh phương pháp

	Phổ tán sắc năng lượng tia X	Kính hiển vi lực nguyên tử
Lĩnh vực	Khoa học vật liệu	Khoa học vật liệu
Họ	Process / pipeline	Process / pipeline
Năm ra đời	1913	1986
Người khởi xướng	Henry Moseley	Gerd Binnig
Loại	Analytical technique	Imaging technique
Công trình gốc	Goldstein, J. I., Newbury, D. E., Michael, J. R., & Ritchie, R. O. (2017). Scanning Electron Microscopy and X-ray Microanalysis (3rd ed.). Springer.	Binnig, G., Quate, C. F., & Gerber, C. (1986). Atomic force microscope. Physical Review Letters, 56(9), 930-933.
Tên gọi khác	EDS, EDX, EDAX, elemental microanalysis	AFM, scanning probe microscopy, nanoindentation microscopy
Liên quan	3	3
Tóm tắt	Energy-Dispersive X-ray Spectroscopy (EDS) is an analytical technique that identifies and quantifies chemical elements in microvolumes of samples by analyzing characteristic X-rays emitted during electron bombardment. Rooted in Moseley's discovery of characteristic X-ray lines in 1913 and developed as a practical microanalytical tool by the 1970s, EDS is integrated into scanning electron microscopes (SEM) and transmission electron microscopes (TEM) for spatially-resolved elemental analysis. It is indispensable in materials characterization for phase identification, compositional mapping, and alloy development.	Atomic Force Microscopy (AFM) is a scanning probe technique that measures nanoscale surface topography and mechanical properties by monitoring interactions between a sharp cantilever tip and a sample surface. Invented by Gerd Binnig in 1986 as an extension of scanning tunneling microscopy, AFM requires neither electrical conductivity nor vacuum operation, making it applicable to virtually any material. It provides three-dimensional topographic maps with sub-nanometer vertical resolution and lateral resolution approaching nanometers, along with simultaneous measurements of mechanical, electrical, and chemical properties.