So sánh phương pháp

	Kính hiển vi lực nguyên tử	Phổ tán sắc năng lượng tia X
Lĩnh vực	Khoa học vật liệu	Khoa học vật liệu
Họ	Process / pipeline	Process / pipeline
Năm ra đời	1986	1913
Người khởi xướng	Gerd Binnig	Henry Moseley
Loại	Imaging technique	Analytical technique
Công trình gốc	Binnig, G., Quate, C. F., & Gerber, C. (1986). Atomic force microscope. Physical Review Letters, 56(9), 930-933.	Goldstein, J. I., Newbury, D. E., Michael, J. R., & Ritchie, R. O. (2017). Scanning Electron Microscopy and X-ray Microanalysis (3rd ed.). Springer.
Tên gọi khác	AFM, scanning probe microscopy, nanoindentation microscopy	EDS, EDX, EDAX, elemental microanalysis
Liên quan	3	3
Tóm tắt	Atomic Force Microscopy (AFM) is a scanning probe technique that measures nanoscale surface topography and mechanical properties by monitoring interactions between a sharp cantilever tip and a sample surface. Invented by Gerd Binnig in 1986 as an extension of scanning tunneling microscopy, AFM requires neither electrical conductivity nor vacuum operation, making it applicable to virtually any material. It provides three-dimensional topographic maps with sub-nanometer vertical resolution and lateral resolution approaching nanometers, along with simultaneous measurements of mechanical, electrical, and chemical properties.	Energy-Dispersive X-ray Spectroscopy (EDS) is an analytical technique that identifies and quantifies chemical elements in microvolumes of samples by analyzing characteristic X-rays emitted during electron bombardment. Rooted in Moseley's discovery of characteristic X-ray lines in 1913 and developed as a practical microanalytical tool by the 1970s, EDS is integrated into scanning electron microscopes (SEM) and transmission electron microscopes (TEM) for spatially-resolved elemental analysis. It is indispensable in materials characterization for phase identification, compositional mapping, and alloy development.