Energy-Dispersive X-ray Spectroscopy
Energy-Dispersive X-ray Spectroscopy (EDS) is an analytical technique that identifies and quantifies chemical elements in microvolumes of samples by analyzing characteristic X-rays emitted during electron bombardment. Rooted in Moseley's discovery of characteristic X-ray lines in 1913 and developed as a practical microanalytical tool by the 1970s, EDS is integrated into scanning electron microscopes (SEM) and transmission electron microscopes (TEM) for spatially-resolved elemental analysis. It is indispensable in materials characterization for phase identification, compositional mapping, and alloy development.
Rekod sumber
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- Goldstein, J. I., Newbury, D. E., Michael, J. R., & Ritchie, R. O. (2017). Scanning Electron Microscopy and X-ray Microanalysis (3rd ed.). Springer. · DOI 10.1007/978-1-4939-6676-9
- Reed, S. J. B. (1993). Electron Microprobe Analysis (2nd ed.). Cambridge University Press. · URL
- Williams, D. B., & Carter, C. B. (2009). Transmission Electron Microscopy: A Textbook for Materials Science (2nd ed.). Springer. · DOI 10.1007/978-0-387-76501-3
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